Demonstration of polarization-independent resonant subwavelength grating filter arrays

We demonstrate a two-dimensional (2D) polarization-independent resonant subwavelength grating (RSG) in a filter array. RSGs, also called guided mode resonant filters, are traditionally one-dimensional gratings; however, this leads to TE and TM resonances at different wavelengths and with different spectral shape. A 2D grating can remove the polarization dependence at normal incidence, while maintaining the desirable RSG properties of high reflectivity, narrow passband, and low sidebands without ripple. We designed and fabricated 2D gratings with near-identical responses for both polarizations at normal incidence in the telecommunication band. Ninety percent reflectivity is achieved at the resonant wavelengths.