Index-distributed planar microlenses for three-dimensional micro-optics fabricated by silver-sodium ion exchange in...

Fabrication of planar microlens arrays by silver-sodium ion exchange is possible by using a new glass type, optimized for this technology. Because of its nonlinear diffusion response it is well suited to the fabrication of microlens arrays. We show that the diffusion coefficient can be described theoretically by an exponential concentration dependence. The parameters of the planar microlenses are measured interferometrically and by imaging experiments. Because of the specific index distribution, new evaluation techniques for the determination of lens parameters from interferometric measurements have been applied. We also present a simple model that relates the achievable lens parameters to the diffusion conditions.