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Optical-standard surfaces of single-crystal silicon for calibrating ellipsometers and reflectometers

T Yasuda, D E Aspnes

    Applied Optics
    |October 14, 2010
    PubMed

    Abstract:

    We show that hydrogen-terminated (111) Si wafers prepared with NH(4)F-based treatments can serve as a calibration standard for ellipsometers and reflectometers.

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