Three-dimensional evaluation of an independent multi-walled carbon nanotube probe by tomography with high-resolution

Toshiaki Tanigaki1, Kishio Hidaka, Motoyuki Hirooka

  • 1Hitachi High-Tech Manufacturing & Service Corporation, 1040 Ichige, Hitachinaka, Ibaraki 312-0033, Japan. tanigaki-toshiaki@naka.hitachi-hitec.com