Transmission Electron Microscopy
Scanning Electron Microscopy
Electron Microscope Tomography and Single-particle Reconstruction
Preparation of Samples for Electron Microscopy
Overview of Microscopy Techniques
Overview of Electron Microscopy
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Updated: Jun 7, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Paula Horny1, Eric Lifshin, Helen Campbell
1Department of Mining and Materials Engineering, McGill University, 3610 University Street, Montréal, Québec H3A 2B2, Canada. paula.horny@mail.mcgill.ca
A new quantitative X-ray microanalysis method for thick samples compensates for beam current fluctuations in cold field emission scanning electron microscopes (FE-SEMs). This approach uses a single spectral measurement, improving accuracy for elemental analysis in materials science.
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