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Temporal variations in the spectral output of a xenon fluoride excimer laser

J Burris, W Heaps

    Applied Optics
    |October 22, 2010
    PubMed

    Abstract:

    The behavior of a xenon fluoride excimer laser's spectral output as a function of the gas fill's age has been measured, and significant variations have been found. The output was preferentially shifted from the 348-nm band into the 351-nm band.

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