Note: Mechanical study of micromachined polydimethylsiloxane elastic microposts

This paper reports the detailed statistical measurement of Young's modulus (E) and spring constant of micromachined three-dimensional polydimethylsiloxane microposts with various sizes using atomic force microscope. The paper also describes the design and fabrication of these microposts. The micropost array was fabricated with a height to diameter aspect ratio of up to 10. We have found that posts with different sizes have different E values, and posts that are cured at room temperature have smaller Young's modulus than the ones that are cured at 65 °C for the same duration.