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Updated: Jun 7, 2026

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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
A double-mode piezoelectric single-crystal ultrasonic micro-actuator
Summary
New lead-free piezoelectric crystals, lead indium niobate-lead magnesium niobate-lead titanate (PIN-PMN-PT), enable a high-performance micro-actuator. This actuator demonstrates precise linear motion for miniature piezo-motor applications.
Area of Science:
- Materials Science: Focuses on the development and characterization of advanced piezoelectric materials.
- Nanotechnology: Explores the application of micro-scale actuators for precision engineering.
Background:
- Ternary lead-free piezoelectric single crystals, specifically Pb(In(1/2)Nb(1/2))O(3)-Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PIN-PMN-PT), were synthesized.
- These crystals exhibit enhanced properties, including a higher coercive field (E(C) ~9 kV/cm) and ferroelectric-transition temperature (T(R-T) = 108°C).
Discussion:
- A double-mode piezoelectric ultrasonic micro-actuator was fabricated using a PIN-PMN-PT crystal brick (5 x 1.5 x 1.32 mm).
- The micro-actuator was designed to operate in both the first longitudinal and second bending modes.
- Characterization included ferroelectric, dielectric, electromechanical, and resonance displacement properties relevant to miniature linear piezo-motor applications.
Key Insights:
- The developed micro-actuator achieved a longitudinal displacement of approximately 0.11 μm at an applied voltage of 5 V.
- This performance is comparable to multilayer piezoelectric-ceramic actuators of similar dimensions.
- The crystal micro-actuator successfully demonstrated its capability to drive a slider linearly.
Outlook:
- The superior properties of PIN-PMN-PT crystals pave the way for next-generation micro-actuators.
- Further research can optimize actuator design for enhanced displacement and efficiency in miniature piezo-motors.
- Potential applications include precision positioning systems, micro-robotics, and advanced sensing technologies.
