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Array Tomography Workflow for the Targeted Acquisition of Volume Information using Scanning Electron Microscopy
Published on: July 15, 2021
Measuring porosity at the nanoscale by quantitative electron tomography
E Biermans1, L Molina, K J Batenburg
1EMAT, University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp, Belgium.
Nano Letters
|November 25, 2010
Summary
Quantitative electron tomography accurately measures nanoscale porosity, even with missing wedge artifacts. The Discrete Algebraic Reconstruction Algorithm (DARA) is ideal for 3D characterization of porous materials.
Area of Science:
- Materials Science
- Nanotechnology
- Imaging Techniques
Background:
- Characterizing porous materials at the nanoscale is crucial for understanding their properties.
- Quantitative three-dimensional (3D) information is essential for reliable analysis.
- Missing wedge artifacts and segmentation methods can compromise tomographic data accuracy.
Purpose of the Study:
- To propose and validate a quantitative electron tomography method for nanoscale porous materials.
- To investigate the impact of missing wedge artifacts and segmentation on 3D quantitative results.
- To identify the most suitable tomography algorithm for nanoscale porosity measurements.
Main Methods:
- Quantitative electron tomography was employed.
- The influence of missing wedge artifacts was analyzed.
- Various segmentation methods were evaluated.
- The Discrete Algebraic Reconstruction Algorithm (DARA) was presented and tested.
Main Results:
- DARA demonstrated accurate 3D quantitative information for nanoscale porosity.
- The method proved effective regardless of missing wedge artifacts.
- Nanovoids in La2Zr2O7 thin films were successfully characterized using this approach.
Conclusions:
- Quantitative electron tomography, specifically using DARA, is a reliable method for nanoscale porosity characterization.
- The proposed approach overcomes limitations posed by missing wedge artifacts.
- This technique offers precise 3D insights into nanostructured porous materials.

