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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Microlens characterization by digital holographic microscopy with physical spherical phase compensation
Qu Weijuan1, Chee Oi Choo, Yu Yingjie
1School of Engineering, Ngee Ann Polytechnic, 535 Clementi Road, Singapore 599489. qwe2@np.edu.sg
Applied Optics
|November 25, 2010
Summary
This study introduces a digital holographic microscopy system that accurately characterizes microlenses. By using a fiber optic reference beam, it eliminates wavefront aberrations for precise quantitative phase measurements.
Area of Science:
- Optics and Photonics
- Microscopy Techniques
Background:
- Digital holographic microscopy (DHM) is a powerful tool for optical metrology.
- Conventional DHM systems often suffer from inherent wavefront aberrations.
- These aberrations complicate accurate phase measurements of micro-optical components.
Purpose of the Study:
- To develop a digital holographic microscopy system for aberration-free characterization of microlenses.
- To leverage fiber optics for an improved reference wave in DHM.
- To achieve direct quantitative phase measurement without complex numerical compensation.
Main Methods:
- Utilized a digital holographic microscopy system incorporating fiber optics.
- Employed light from a single-mode fiber as the recording reference wave.
- Optimized optical setup alignment using numerical reconstruction software to remove off-axis tilt.
Main Results:
- Demonstrated a DHM system immune to inherent wavefront aberrations.
- Achieved a quasi-identical object and reference wavefront using a specific fiber optic setup.
- Successfully obtained direct quantitative phase of microlenses without complex numerical compensation.
Conclusions:
- The developed fiber-optic-based DHM system effectively eliminates wavefront aberrations.
- This method provides a simplified and accurate approach for microlens characterization.
- The system enables direct quantitative phase imaging, enhancing metrological capabilities.
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