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Atomic Force Microscopy

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...

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Updated: Jun 6, 2026

Atomically Traceable Nanostructure Fabrication

Atomically Traceable Nanostructure Fabrication

Published on: July 17, 2015

Precise control of nanofabrication by atomic force microscopy.

H Kuramochi¹, T Tokizaki, T Onuki

¹Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan.

Journal of Nanoscience and Nanotechnology

|December 7, 2010

Summary

Precise control of anodic oxidation using atomic force microscopy was enhanced through mechanism studies and technical improvements. This research improves nanofabrication accuracy and reliability for practical applications.

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Area of Science:

Materials Science
Nanotechnology
Surface Science

Background:

Anodic oxidation is a key nanofabrication technique.
Precise control over nanoscale fabrication remains a challenge.
Understanding the underlying mechanisms is crucial for improvement.

Purpose of the Study:

To achieve precise control of the anodic oxidation process using atomic force microscopy.
To enhance the accuracy and reliability of nanofabrication.
To investigate the mechanism of nano-oxidation through Faradaic current detection.

Main Methods:

Ambient humidity control
Improvement of instrumental performance
Meniscus lifetime control
In situ Faradaic current detection
Patchwork method for large-area fabrication

Main Results:

Improved accuracy and reliability in nanofabrication.
Faradaic current detection serves as a reliable monitor for nano-oxidation.
Identification of controllable physical parameters affecting product size.
Demonstration of fast, large-area fabrication and current-controlled nanofabrication.

Conclusions:

Technical improvements based on mechanism studies significantly enhance anodic oxidation control.
In situ Faradaic current detection offers high reliability for monitoring nano-oxidation.
Practical engineering solutions are proposed for precise nano-oxidation and large-area fabrication.