Preparation of protein nanoarray on silicon surface by atomic force microscopy nanofabrication

Atomic force microscopy (AFM) with bias control is employed to fabricate oxidized nanopatterns on a silicon surface with a feature size as low as 50 nm. Nanopatterns made by a Pt/Ir coating probes have larger feature size than these made by the probe without, but the patterning speed is fast, 0.1 s per dot. 20 nm gold nanoparticles are immobilized on oxide nanopatterns to elucidate the dimensions of the nanoparticles on an oxide nanopattern. These patterning conditions are utilized to prepare a nanoarray for the immobilization of biotins to interact with free streptavidins. The resultant height of the biotin labeled on oxidized nanopattern is 0.93 +/- 0.1 nm and the combined height of biotin-streptavidin is 5.14 +/- 0.45 nm, as determined using the imaging functions of AFM. Based on the experimental results, a nano biochip of silicon dioxide can be utilized to monitor molecular interactions on the nanometer scale under static conditions and without the labeling of fluorescence dyes.