Mechanical properties of multilayered films using different nanoindenters
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Updated: Jun 6, 2026

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Te-Hua Fang1, Tong Hong Wang, Jia-Hung Wu
1Institute of Mechanical and Electromechanical Engineering, National Formosa University, Yunlin 632, Taiwan.
Abstract:
The effects of interface, contact hardness, deformation, and adhesion of Al/Ni multilayered films under nanoindentation were investigated using molecular dynamics (MD) simulations. The results show that the indentation force of the sphere indenter is the largest among nanoindentations using sphere, cone, Vickers, or Berkovich type indenters at the same penetration depth. Force increasing, relaxation and adhesion took place during loading, holding depth and unloading, respectively. The interface occurred along the {111} (110) slip systems and the maximum width of the glide bands was about 1 nm. The reaction force and plastic energy of the indented films are also discussed.

