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Atomic Force Microscopy

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...

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Updated: Jun 6, 2026

Scanning-probe Single-electron Capacitance Spectroscopy

Scanning-probe Single-electron Capacitance Spectroscopy

Published on: July 30, 2013

Calibrated nanoscale capacitance measurements using a scanning microwave microscope.

H P Huber¹, M Moertelmaier, T M Wallis

¹Christian Doppler Laboratory for Nanoscopic Methods in Biophysics, University of Linz, Altenbergerstrasse 69, 4040 Linz, Austria.

The Review of Scientific Instruments

|December 8, 2010

Summary

This summary is machine-generated.

A novel scanning microwave microscope (SMM) precisely measures capacitance at the nanoscale. This atomic force microscope (AFM) and network analyzer (PNA) system achieves attofarad sensitivity for advanced material characterization.

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All-electronic Nanosecond-resolved Scanning Tunneling Microscopy: Facilitating the Investigation of Single Dopant Charge Dynamics

All-electronic Nanosecond-resolved Scanning Tunneling Microscopy: Facilitating the Investigation of Single Dopant Charge Dynamics

Published on: January 19, 2018

Area of Science:

Materials Science
Nanotechnology
Electrical Engineering

Background:

Accurate nanoscale capacitance measurement is crucial for advanced materials and devices.
Existing techniques may lack the required sensitivity or spatial resolution.
Developing new metrology tools is essential for semiconductor and nanotechnology research.

Purpose of the Study:

To present a scanning microwave microscope (SMM) for high-resolution capacitance measurements.
To achieve measurements in the attofarad-to-femtofarad range with high accuracy.
To characterize the electrical properties of nanoscale dielectric structures.

Main Methods:

Integration of an atomic force microscope (AFM) with a performance network analyzer (PNA).
Utilized a calibration sample with gold pads on a SiO(2) staircase for absolute capacitance determination.
Employed PNA reflection amplitude analysis and comparison with an external capacitance bridge.

Main Results:

Achieved capacitance measurements from 0.1 to 22 fF with a noise level of approximately 2 aF.
Demonstrated a relative accuracy of 20% for the SMM measurements.
Determined an effective tip radius of ~60 nm and tip-sample capacitance of ~20 aF.

Conclusions:

The developed SMM system enables precise, spatially resolved capacitance measurements at the nanoscale.
The system's performance is validated through calibration and comparison with established methods.
The SMM provides valuable insights into the electrical characteristics of thin dielectric films and tip-sample interactions.