Comment on "MEMS-based high speed scanning probe microscopy" [Rev. Sci. Instrum. 81, 043702 (2010)]

Area of Science:

• Materials Science and Engineering
• Nanotechnology
• Physics

Background:

• A micromachined electrostatically actuated membrane scanner for scanning probe microscopy (SPM) was recently presented.
• The scanner utilizes crab-leg flexures for anchoring and is designed for atomic force microscopy (AFM) and scanning tunneling microscopy (STM).

Discussion:

• The authors' claim of novelty regarding high-speed imaging with feedback in microelectromechanical systems (MEMS) SPM is not fully supported by existing literature.
• Similar actuator structures, though on a slightly larger scale, have been previously designed and implemented for SPM applications.

Key Insights:

• The significance of the presented micromachined z-scanner needs to be contextualized within the broader landscape of MEMS-based SPM actuators.
• Previous research has demonstrated high-speed imaging capabilities and feedback mechanisms in SPM systems.

Outlook:

• Further clarification of the scanner's unique contributions and advantages over existing technologies is warranted.
• Comparative studies evaluating performance metrics against established SPM actuators would enhance understanding.