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Vapor-phase synthesis of indium (III) oxide nanocrystals
Vitaly I Korepanov1, Arcadii N Red'kin
1Institute of Microelectronics Technology and High Purity Materials, 6, Institutskaya Street, Chernogolovka, Moscow Region, 142432, Russia.
Journal of Nanoscience and Nanotechnology
|December 9, 2010
Abstract:
A new way for chemical vapor deposition of indium (111) oxide is presented. It can be used to obtain both polycrystalline films and different arrays of nanocrystals. Used as a catalyst, In or Au thin films can afford selective deposition on an arbitrary spot of surface. The obtained materials were characterized electron microscopy, X-ray diffraction and cathodoluminescence methods.
