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Updated: Jun 6, 2026

Micro-drive Array for Chronic in vivo Recording: Drive Fabrication
Published on: April 20, 2009
Fabrication and MFM study of 60 nm track-pitch discrete track media
Jin-Seung Sohn1, Duhyun Lee, Eunhyoung Cho
1Samsung Advanced Institute of Technology, Yongin-si, Gyeonggi-do, Korea. sohn@samsung.com
Abstract:
Discrete track magnetic recording media with a 60 nm track pitch and prewritten servo patterns were fabricated and tested for read/write performance, and a feasibility analysis of the embedded servo was performed. The fabrication process consisted of ultraviolet nanoimprint lithography (UV-NIL) and sequential ion beam etching on a conventional perpendicular magnetic recording medium. Magnetic patterns were written to the fabricated tracks at 700 kilo flux changes per inch (kFCI) using a spin stand and were read using magnetic force microscopy (MFM), with a resulting signal-to-noise ratio (SNR) of 12.15 dB. The servo pattern was also visualized with MFM. These results demonstrated the feasibility of writing to a 30 nm wide discrete data track and the workability of the embedded servo pattern.
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