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Large range and high resolution on-line displacement measurement system by combining double interferometres
1Laboratory for Optical Information Science and Technology, Department of Physics, School of Science, Beijing Jiaotong University, Beijing 100044, China. fxie@bjtu.edu.cn
Optics Express
|December 18, 2010
Summary
This study introduces a stabilized interferometric displacement measurement system for real-time applications. It achieves a millimeter measurement range and sub-nanometer resolution by using dual wavelengths and a feedback loop.
Area of Science:
- Optics and Photonics
- Metrology
- Instrumentation Engineering
Background:
- Interferometric displacement measurement systems are crucial for precision engineering.
- Environmental disturbances often limit the stability and accuracy of on-line measurements.
- Achieving both large measurement range and high resolution simultaneously is a significant challenge.
Purpose of the Study:
- To propose a stabilized interferometric displacement measurement system.
- To enable on-line measurement with enhanced range and resolution.
- To overcome limitations imposed by environmental factors.
Main Methods:
- A feedback loop was implemented to stabilize the system against environmental disturbances.
- Two different wavelengths were employed simultaneously within the interferometric setup.
- Synthetic-wavelength interferometry was utilized to expand the measurement range.
Main Results:
- The feedback loop successfully stabilized the system for on-line measurement.
- The system achieved a measurement range on the order of millimeters.
- A measurement resolution on the order of sub-nanometers was attained.
Conclusions:
- The proposed stabilized interferometric system offers a practical solution for high-precision, on-line displacement measurements.
- The combination of dual-wavelengths and feedback stabilization effectively expands measurement range while maintaining high resolution.
- This technology has potential applications in various fields requiring precise real-time dimensional analysis.
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