Precise beam-tilt alignment and collimation are required to minimize the phase error associated with coma in

Robert M Glaeser1, Dieter Typke, Peter C Tiemeijer

  • 1Life Sciences Division, Lawrence Berkeley National Laboratory, University of California, Berkeley, CA 94720, USA. rmglaeser@lbl.gov

Summary

Achieving high-resolution electron microscopy (0.4nm or better) requires precise illumination control to prevent phase errors from axial and off-axis coma. Standard contrast transfer function correction methods do not address these coma-induced errors.