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Updated: Jun 5, 2026

Monolayer Contact Doping of Silicon Surfaces and Nanowires Using Organophosphorus Compounds
Published on: December 2, 2013
Phosphorus δ-doped silicon: mixed-atom pseudopotentials and dopant disorder effects
Damien J Carter1, Nigel A Marks, Oliver Warschkow
1Nanochemistry Research Institute, Curtin University, Perth, WA, Australia. d.carter@curtin.edu.au
Abstract:
Within a full density functional theory framework we calculate the band structure and doping potential for phosphorus δ-doped silicon. We compare two different representations of the dopant plane; pseudo-atoms in which the nuclear charge is fractional between silicon and phosphorus, and explicit arrangements employing distinct silicon and phosphorus atoms. While the pseudo-atom approach offers several computational advantages, the explicit model calculations differ in a number of key points, including the valley splitting, the Fermi level and the width of the doping potential. These findings have implications for parameters used in device modelling.
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