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Updated: Jun 5, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Lithography-free fabrication of carbon nanotube network transistors
Marina Y Timmermans1, Kestutis Grigoras, Albert G Nasibulin
1Department of Applied Physics, Aalto University School of Science and Technology, Aalto, Finland. marina.timmermans@hut.fi
Abstract:
A novel non-lithographic technique for the fabrication of carbon nanotube thin film transistors is presented. The whole transistor fabrication process requires only one mask which is used both to pattern transistor channels based on aerosol synthesized carbon nanotubes and to deposit electrodes by metal evaporation at different angles. An important effect of electrodynamic focusing was utilized for the directed assembly of transistor channels with feature sizes smaller than the mask openings. This dry non-lithographic method opens up new avenues for device fabrication especially for low cost flexible and transparent electronics.

