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Spectroscopic null ellipsometer using a variable retarder.

Lionel R Watkins1, Sophie S Shamailov

  • 1Department of Physics, University of Auckland, P.B. 92019, Auckland, New Zealand. l.watkins@auckland.ac.nz

Applied Optics
|January 12, 2011
PubMed
Summary
This summary is machine-generated.

This study introduces a novel polarizer-compensator-sample-analyzer (PCSA) null ellipsometer using a variable retarder. This new method accurately determines thin film thicknesses, matching traditional techniques.

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Area of Science:

  • Optics and Photonics
  • Materials Science
  • Surface Analysis

Background:

  • Ellipsometry is a powerful technique for characterizing thin films.
  • Traditional PCSA null ellipsometers often use fixed compensators, limiting flexibility.
  • Developing adaptable ellipsometry systems is crucial for advanced material analysis.

Purpose of the Study:

  • To present a modified polarizer-compensator-sample-analyzer (PCSA) null ellipsometer design.
  • To demonstrate the direct determination of ellipsometric angles using a variable retarder.
  • To validate the accuracy of this new system for thin film thickness measurements.

Main Methods:

  • Utilized a variable retarder, specifically a Soleil-Babinet compensator with quartz plates, as the compensator in a PCSA setup.
  • Maintained a fixed azimuthal angle for either the polarizer or analyzer.
  • Calculated retarder delay at various wavelengths using dispersion data and a reference measurement at 632.8 nm.

Main Results:

  • Successfully implemented a PCSA null ellipsometer with a variable retarder.
  • Ellipsometric angles (ψ and Δ) were directly determined from the rotating component's azimuth and compensator delay.
  • Accurate thickness measurements of silicon dioxide films on silicon wafers were achieved, consistent with traditional methods.

Conclusions:

  • The developed variable retarder-based PCSA null ellipsometer offers a viable and accurate alternative for thin film characterization.
  • This method simplifies data acquisition by directly relating angles to physical parameters.
  • The system demonstrates excellent agreement with established ellipsometric techniques, highlighting its reliability.