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A rapid and economical method for profiling feature heights during microfabrication
Gloria S Yen1, Bryant S Fujimoto, Thomas Schneider
1Department of Chemistry, University of Washington, Seattle, WA 98195-1700, USA.
Lab on a Chip
|January 14, 2011
Summary
This study introduces a fast, affordable method for measuring microfabrication structure heights. White-light interferometry provides sub-micrometer accuracy for quality control in microfabrication.
Area of Science:
- Materials Science
- Metrology
- Nanotechnology
Background:
- Quality control is crucial in microfabrication.
- Assessing feature widths is straightforward with light microscopy.
- Measuring fabricated structure heights presents a significant challenge.
Purpose of the Study:
- To present a novel method for measuring microfabricated structure heights.
- To offer a rapid, accurate, and low-cost solution for height measurement.
- To enable in-process and post-process dimensional verification.
Main Methods:
- Utilizing white-light interferometry.
- Developing a technique for microfabrication quality control.
- Implementing a measurement solution for sub-micrometer accuracy.
Main Results:
- Demonstrated a rapid measurement capability.
- Achieved high accuracy on the sub-micrometer scale.
- Provided a cost-effective solution for height assessment.
Conclusions:
- The developed white-light interferometry technique is effective for microfabrication quality control.
- This method addresses the challenge of measuring micro-structure heights.
- It offers a practical and precise tool for researchers and engineers in microfabrication.
