Related Experiment Video
Updated: Jun 5, 2026

Fabrication and Testing of Microfluidic Optomechanical Oscillators
Published on: May 29, 2014
AN ARRAY OF MONOLITHIC FBAR-CMOS OSCILLATORS FOR MASS-SENSING APPLICATIONS
None:
We present a monolithic, solidly-mounted CMOS-FBAR oscillator array for mass sensing applications. Thin-film bulk acoustic resonators (FBAR) are an effective platform for sensitive biological and chemical detection, where their high operating frequencies make them many times more sensitive than a quartz crystal microbalance. By monolithic integration with CMOS drive circuitry, we aim to overcome the spatial limitations of externally-coupled resonators to build dense sensor arrays without specialized fabrication techniques. The sensors in this work are constructed in a 6 × 4 array atop a 0.18microm CMOS active substrate, and mass sensitivity comparable to off-chip FBAR sensors is demonstrated.
Related Concept Videos
Oscillations In An LC Circuit
Semiconductors
Metals such as copper (Cu), zinc (Zn), or lead (Pb) have low resistivity and feature conduction bands that are either not fully occupied or overlap with the valence band, making a bandgap non-existent. This allows electrons in the highest energy levels of the valence band to easily transition to the conduction band upon gaining...
MOS Capacitor
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...
Mass Analyzers: Common Types
MOSFET Amplifiers
Design Example: Capacitance Multiplier Circuit
The circuit illustrated in Figure 1 below incorporates two op-amps, with the first operating as a voltage follower and the second acting as an inverting amplifier.

