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Fourier analysis for rotating-element ellipsometers.

Yong Jai Cho1, Won Chegal, Hyun Mo Cho

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Summary

We developed a new Fourier analysis for multichannel rotating-element ellipsometers. This method captures Fourier coefficients from light variations, offering broader applicability than traditional Hadamard transforms for diverse detector readouts.

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Area of Science:

  • Optics and Photonics
  • Materials Science
  • Spectroscopy

Background:

  • Multichannel rotating-element ellipsometry is crucial for material characterization.
  • Conventional data acquisition methods like the Hadamard transform have limitations with specific detector timing and array configurations.

Purpose of the Study:

  • To introduce a generalized Fourier analysis for processing periodic light-irradiance variations in multichannel rotating-element ellipsometry.
  • To develop a method applicable to various line arrays and readout timings, overcoming limitations of existing techniques.

Main Methods:

  • A discrete Fourier transform is applied to recorded exposures to obtain Fourier coefficients.
  • The developed analysis provides a generic function that can encompass both discrete Fourier and Hadamard transforms.
  • Experimental validation was performed using a custom-built rotating-polarizer ellipsometer.

Main Results:

  • The Fourier analysis successfully captured Fourier coefficients for a sample.
  • The method demonstrated applicability across different experimental conditions, including varying scan numbers, integration times, and polarizer rotation speeds.
  • The analysis proved more versatile than the Hadamard transform, accommodating diverse detector readout modes.

Conclusions:

  • The novel Fourier analysis offers a flexible and broadly applicable approach for multichannel rotating-element ellipsometry.
  • This method enhances data acquisition by supporting various detector configurations and readout timings.
  • The findings pave the way for more adaptable and efficient ellipsometric measurements in materials science and optics.