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SiC/W/Ir multilayer-coated grating for enhanced efficiency in 50-100 nm wavelength range in Seya-Namioka mount
Shengnan He1, Ying Liu, Jingtao Zhu
1National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, Anhui 230029, China.
Abstract:
A broadband [SiC/W/Ir](2) multilayer coating was deposited onto a diffraction grating to enhance the grating efficiency in the 50-100 nm wavelength range in a Seya-Namioka mount. The holographic ion-beam etched grating had a laminar profile with 1200 lines/mm. The coating was designed by using the subquarterwave multilayer theory. The measurement results show that the efficiency in the -1st diffraction order is greater than 9.3% throughout the wavelength range of 50-100 nm, which is obviously higher than that of single-layer gratings with SiC, Ir, or Au coatings.
