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Published on: April 11, 2025
Miniaturization of dielectric liquid microlens in package
Chih-Cheng Yang1, C Gary Tsai, J Andrew Yeh
1Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu 30013, Taiwan.
Abstract:
This study presents packaged microscale liquid lenses actuated with liquid droplets of 300-700 μm in diameter using the dielectric force manipulation. The liquid microlens demonstrated function focal length tunability in a plastic package. The focal length of the liquid lens with a lens droplet of 500 μm in diameter is shortened from 4.4 to 2.2 mm when voltages applied change from 0 to 79 V(rms). Dynamic responses that are analyzed using 2000 frames∕s high speed motion cameras show that the advancing and receding times are measured to be 90 and 60 ms, respectively. The size effect of dielectric liquid microlens is characterized for a lens droplet of 300-700 μm in diameter in an aspect of focal length.

