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Phase-locked loop based on machine surface topography measurement using lensed fibers.

Jin-Ho Kang1, ChaBum Lee, Jae-Young Joo

  • 1School of Mechatronics, Gwangju Institute of Science and Technology, Buk-gu, Gwangju, South Korea.

Applied Optics
|February 2, 2011
PubMed
Summary

We developed a phase-locked loop (PLL) metrology for on-machine surface topography measurement using lensed fibers. Both tapered and ball-type fibers enabled accurate surface profile measurements, showing potential for industrial applications.

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Area of Science:

  • Optics and Photonics
  • Metrology and Measurement Science

Background:

  • Accurate on-machine surface topography measurement is crucial for manufacturing quality control.
  • Traditional methods may have limitations in speed, accuracy, or adaptability to dynamic manufacturing environments.

Purpose of the Study:

  • To introduce and evaluate a novel phase-locked loop (PLL)-based metrology concept for on-machine surface topography measurement.
  • To design, fabricate, and test lensed fibers (ball and tapered types) for this application.

Main Methods:

  • Utilized an ABCD matrix method for designing the single-mode fiber endface shape.
  • Fabricated and evaluated both ball-type and tapered-type lensed fibers.
  • Assessed measurement capabilities using autofocusing, intensity methods, and Fizeau interferometry.
  • Compared performance against capacitance sensors and a commercial white-light interferometer.

Main Results:

  • The ball-type lensed fiber enabled surface measurement via autofocusing and intensity, despite lacking interferometric fringe.
  • The tapered-type lensed fiber produced clear Fizeau interferometric fringes, facilitating high-resolution topography measurement.
  • Both lensed fiber types demonstrated applicability for on-machine surface profile measurement.

Conclusions:

  • The developed PLL-based metrology concept using lensed fibers is suitable for on-machine surface topography measurement.
  • The tapered lensed fiber shows promise for high-accuracy interferometric surface profiling.
  • The ball lensed fiber offers an alternative approach for surface measurement in specific on-machine scenarios.