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Related Experiment Video

Updated: Jun 4, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

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Published on: October 11, 2016

Phase measurement x-ray interferometry.

D R Schwarzenberger¹, D G Chetwynd, D K Bowen

¹Centre for Microengineering and Metrology, Department of Engineering, University of Warwick, Coventry CV4 7AL, United Kingdom.

Journal of X-Ray Science and Technology

|February 11, 2011

Summary

This summary is machine-generated.

This study introduces a phase-step method for x-ray interferometry, enabling precise displacement measurements with high accuracy. The technique offers improved reliability and tolerance to experimental errors for advanced scientific applications.

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Area of Science:

Materials Science
Physics
Metrology

Background:

X-ray interferometry is crucial for high-precision measurements.
Existing fringe analysis methods have limitations in accuracy and reliability.
Standard phase-plot methods require adaptation for interferometric fringe analysis.

Purpose of the Study:

To develop a phase-step procedure for x-ray interferometry.
To enable the use of standard phase-plot methods for fringe analysis.
To enhance the precision and reliability of displacement measurements.

Main Methods:

A phase-step procedure was implemented with an x-ray interferometer.
Standard phase-plot methods were adapted for fringe analysis.
Silicon (111) lattice planes were used as diffracting elements (period 0.3135625 nm).

Main Results:

The phase-step method allows for precise interpolation of fringe spacings.
The technique is more tolerant of experimental uncertainties compared to previous methods.
Routine displacement measurements with a standard deviation of 0.003 nm were achieved.

Conclusions:

The developed phase-step procedure significantly improves x-ray interferometry.
This method offers enhanced precision and reliability for displacement metrology.
The experimental and data analysis methods for achieving high resolution are detailed.