Characterization of a Multilayer Coated Laminar Reflection Grating at λ = 0.154 nm

A laminar grating of 1200 1/mm was coated with an x-ray reflecting multilayer coating. The multilayer coating consisted of 41 alternating layers of ReW and C having a period of 2.3 nm. In this paper we report on diffraction measurements of the coated grating at the CuKα emission line. We describe its reflection behavior using a simple theoretical model and derive two diffraction conditions, corresponding to the grating relation and the Bragg law, for which peak intensities are to be observed. We find that grating order efficiencies are modulated by the multilayer reflection.