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Tungsten/Magnesium silicide multilayers for soft x-ray optics.

P Boher¹, P Houdy, M Kühne

¹Laboratoires d'Electronique Philips (LEP), 22 Avenue Descartes, BP15, 94453 Limeil-Brevannes Cedex, France.

Journal of X-Ray Science and Technology

|February 11, 2011

Summary

Tungsten/Magnesium Silicide (W/Mg2Si) multilayers demonstrate high reflectivity for soft X-ray optics. These advanced materials show promise for applications utilizing MgKα and MgLα X-ray lines.

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Area of Science:

Materials Science
Optics
X-ray Physics

Background:

Soft X-ray optics require specialized multilayer coatings for efficient performance.
Tungsten/Magnesium Silicide (W/Mg2Si) multilayers are investigated for their potential in this domain.
Previous systems like Molybdenum/Silicon (Mo/Si) have limitations in selectivity and reflectivity.

Purpose of the Study:

To deposit and characterize W/Mg2Si multilayers for soft X-ray optics.
To evaluate their performance specifically around the MgKα and MgLα X-ray lines.
To correlate structural properties with observed soft X-ray performance.

Main Methods:

Radio frequency (RF) sputtering deposition technique.
In situ kinetic ellipsometry and ex situ grazing X-ray reflection for structural analysis.

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High-resolution electron microscopy (HREM) for interface and layer characterization.

Synchrotron radiation measurements to assess soft X-ray performance.

Main Results:

Achieved first Bragg peak reflectivities up to 31% for multilayers with a 84 Å double period.
Observed well-defined Bragg peaks even for smaller double periods down to 44 Å.
Demonstrated over 20% reflectivity near the MgLα line at normal incidence.
Exhibited two times higher selectivity compared to conventional Mo/Si systems at MgLα wavelengths.

Conclusions:

W/Mg2Si multilayers are effective for soft X-ray optics, particularly for MgKα and MgLα lines.
Structural characteristics significantly influence soft X-ray performance, with interface interdiffusion impacting reflectivity.
These multilayers offer superior selectivity over conventional systems, opening new possibilities for X-ray applications.