The New NIST/ARPA National Soft X-Ray Reflectometry Facility

We have recently begun a series of upgrades to the NIST/ARPA National Reflectometry Facility at the Synchrotron Ultraviolet Radiation Facility. The facility currently consists of a new monochromator and the original sample manipulator which allows us to measure optical components less than 10 cm in diameter. The monochromator offers high throughput and modest resolution over the wavelength range 3.5-40 nm. In the next year we will be installing a sample manipulator that will be able to accommodate the much larger optics that will be used in future x-ray projection lithography and astronomy instruments. We offer preliminary measurements of the throughput and resolution of the new monochromator.