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Updated: Jun 4, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Nondestructive evaluation of millimeter scale engineered structures using synchrotron x-ray microtomography
1School of Engineering, Vanderbih University, Box 6079 Station B, Nashville, Tennessee 37235.
Abstract:
Synchrotron x-ray microtomography has matured into a practical tool for the metrology of small specimens, featuring a spatial resolution of a few micrometers. In this paper, the author examines the practice of monochromatic x-ray tomography, emphasizing the characteristics of synchrotron radiation sources that have enabled the evolution of this new imaging technology. These principles are illustrated using reconstructions of millimeter scale engineered structures fabricated from low atomic weight materials. These structures include spherical shells, considered as model inertial confinement fusion targets, and examples of laser-welded aluminum alloys.
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