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Creating Sub-50 Nm Nanofluidic Junctions in PDMS Microfluidic Chip via Self-Assembly Process of Colloidal Particles
Published on: March 13, 2016
Studies on Parylene C-caulked PDMS (pcPDMS) for low permeability required microfluidics applications
Yinhua Lei1, Yaoping Liu, Wei Wang
1National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, PR China.
Lab on a Chip
|February 18, 2011
Abstract:
This note introduced a complete fabrication strategy of Parylene C-caulked PDMS (pcPDMS) for low permeability required microfluidics applications. The bonding issue enrolled in the pcPDMS fabrication was solved based on careful surface analyses of the Parylene C caulked status in the PDMS matrix.
