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Updated: Jun 4, 2026

Building Langmuir Probes and Emissive Probes for Plasma Potential Measurements in Low Pressure, Low Temperature Plasmas
Published on: May 25, 2021
Note: Interpolation for evaluation of a two-dimensional spatial profile of plasma densities at low gas pressures
Se-Jin Oh1, Young-Chul Kim, Chin-Wook Chung
1Department of Electrical Engineering, Hanyang University, Seoul, South Korea.
Abstract:
An interpolation algorithm for the evaluation of the spatial profile of plasma densities in a cylindrical reactor was developed for low gas pressures. The algorithm is based on a collisionless two-dimensional fluid model. Contrary to the collisional case, i.e., diffusion fluid model, the fitting algorithm depends on the aspect ratio of the cylindrical reactor. The spatial density profile of the collisionless fitting algorithm is presented in two-dimensional images and compared with the results of the diffusion fluid model.
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