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Control of solid-state lasers using an intra-cavity MEMS micromirror
Walter Lubeigt1, Joao Gomes, Gordon Brown
1Institute of Photonics, University of Strathclyde, Wolfson Centre, 16 Rottenrow, Glasgow G4 0NW, UK. walter.lubeigt@strath.ac.uk
Optics Express
|March 4, 2011
Summary
Micro-Electro-Mechanical Systems (MEMS) micromirrors controlled a Nd:YLF laser. Thermal deformation limited continuous-wave power, but electrostatic MEMS enabled Q-switching for pulsed laser output.
Area of Science:
- Optics and Photonics
- Micro-Electro-Mechanical Systems (MEMS)
- Laser Physics
Background:
- Micro-mirrors are crucial optical components in laser systems.
- Nd-doped lasers, specifically Nd:YLF, are widely used for various applications.
- MEMS technology offers miniaturized and precise control for optical elements.
Purpose of the Study:
- To investigate the use of MEMS micromirrors as a control element in a Nd:YLF laser cavity.
- To assess the performance limitations of MEMS micromirrors due to thermal effects.
- To demonstrate Q-switching using electrostatic MEMS micromirrors for pulsed laser generation.
Main Methods:
- Integration of high-reflectivity electrothermal and electrostatic MEMS micromirrors into a 3-mirror Nd:YLF laser setup.
- Characterization of continuous-wave (CW) oscillation and output power.
- Analysis of thermally-induced surface deformation on the micromirror.
- Implementation of electrostatic actuation for Q-switching and measurement of pulse parameters.
Main Results:
- Stable CW oscillation achieved with a maximum output power of 200 mW.
- Thermally-induced surface deformation of the micromirror was identified as the limiting factor for CW output power.
- Electrostatic MEMS micromirror successfully induced Q-switching.
- Achieved pulse durations ranged from 220 ns to 2 μs with repetition frequencies from 6 kHz to 40 kHz.
Conclusions:
- MEMS micromirrors are viable for laser cavity control.
- Thermal management is critical for optimizing CW performance of MEMS-based lasers.
- Electrostatic MEMS micromirrors provide effective Q-switching for pulsed laser operation.

