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Vertically-integrated multimode interferometer coupler for 3D photonic circuits in SOI.

Chris J Brooks1, Andrew P Knights, Paul E Jessop

  • 1Centre for Emerging Device Technologies, McMaster University, Department of Engineering Physics, 1280 Main Street West, Hamilton, ON, L8S 4L7, Canada.

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Researchers demonstrated vertical optical coupling using silicon-on-insulator (SOI) material for 3D photonic circuits. This method efficiently transfers optical power between stacked waveguide layers with high coupling ratios.

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Area of Science:

  • Photonics
  • Optical Engineering
  • Materials Science

Background:

  • Three-dimensional (3D) photonic circuits require efficient methods for vertical optical power transfer between stacked waveguide layers.
  • Silicon-on-insulator (SOI) technology offers CMOS compatibility, making it attractive for integrated photonics.

Purpose of the Study:

  • To demonstrate vertical optical coupling in a multimode interferometer structure fabricated using SOI.
  • To enable efficient optical power transfer between vertically stacked waveguide layers for 3D photonic integrated circuits.

Main Methods:

  • Fabrication of a multimode interferometer structure using standard photolithography and etching techniques on SOI material.
  • Design of a structure with a selectively fabricated silicon channel to isolate multimode waveguide sections.
  • Characterization of optical coupling between upper and lower waveguide regions.

Main Results:

  • Successful demonstration of vertical optical coupling in the fabricated SOI structure.
  • Achieved a high optical coupling ratio of 93±4% between the upper and lower waveguide layers.
  • Coupler length optimized to 241 µm for efficient power transfer.

Conclusions:

  • The demonstrated vertical optical couplers are suitable for integration into 3D photonic circuits.
  • The use of SOI material and standard fabrication techniques ensures CMOS compatibility.
  • This approach provides a viable method for controlled optical power transfer in complex photonic architectures.