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X-ray Diffraction of Biological Samples01:10

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X-ray diffraction or XRD is an analytical tool that utilizes X-rays to study ordered structures such as crystalline organic and inorganic samples, polycrystalline materials, proteins, carbohydrates, and drugs.
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Related Experiment Video

Updated: Jun 3, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
07:24

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis

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Depth-selective structural analysis of thin films using total-external-reflection x-ray diffraction.

Tomoaki Kawamura1, Hiroo Omi

  • 1Nichia Corporation, Yokohama Technology Center, 13-19-3 Moriya, Kanagawa, Yokohama, Kanagawa 221-0022, Japan. tomoaki.kawamura@nichia.co.jp

Journal of Physics. Condensed Matter : an Institute of Physics Journal
|March 10, 2011
PubMed
Summary

Total-external-reflection (TER) x-ray diffraction offers depth-sensitive analysis of layered structures. This technique precisely controls observation depth for evaluating semiconductor materials.

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Area of Science:

  • Materials Science
  • Condensed Matter Physics
  • Surface Science

Background:

  • Layered structures are crucial in advanced materials.
  • Characterizing thin films and interfaces requires depth-specific techniques.
  • Existing methods may lack the necessary depth resolution for certain nanoscale structures.

Purpose of the Study:

  • To review the principles and applications of Total-External-Reflection (TER) x-ray diffraction.
  • To highlight TER's capability for depth-sensitive analysis of layered materials.
  • To showcase its utility in evaluating semiconductor heterostructures and quantum wells.

Main Methods:

  • Detailed explanation of the Total-External-Reflection (TER) x-ray diffraction technique.
  • Description of the measurement apparatus used for TER.
  • Control of probing depth by adjusting incident and exit angles of x-rays.

Main Results:

  • TER x-ray diffraction provides depth-sensitive evaluation of layered structures.
  • The technique is effective for analyzing epitaxial heterostructures, ion-doped crystals, and quantum-well structures.
  • Adjustable incident and exit angles allow precise control over the observation depth.

Conclusions:

  • TER x-ray diffraction is a powerful, depth-sensitive tool for characterizing layered materials.
  • Its application extends to various semiconductor structures, offering valuable insights.
  • The technique's ability to control observation depth makes it indispensable for nanoscale material analysis.