Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform
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Updated: Jun 3, 2026

Silicon Metal-oxide-semiconductor Quantum Dots for Single-electron Pumping
Published on: June 3, 2015
Dazeng Feng1, Ning-Ning Feng, Cheng-Chih Kung
1Kotura Inc., 2630 Corporate Place, Monterey Park, California 91754, USA. dfeng@kotura.com
Abstract:
We demonstrate a compact, single-chip 40-channel, dense wavelength division multiplexing (DWDM) variable attenuator multi/demultiplexer (VMUX/DEMUX) by monolithic integration of an echelle grating and high-speed p-i-n VOA on the silicon-on-insulator (SOI) platform. The demonstrated device has a flat-top filter shape, on chip loss of 5.0 dB, low PDL of 0.3 dB after compensation of the polarization dependent frequency (PDF) shift, a fast attenuation response speed of 3 MHz, and an area of only 25 mm by 10 mm.
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