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Updated: Jun 3, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Lian-Wee Luo1, Gustavo S Wiederhecker, Jaime Cardenas
1School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA. ll399@cornell.edu
We developed high-quality silicon photonic ring resonators using a novel etchless fabrication method. This technique achieves a high intrinsic quality factor, reducing signal loss for improved photonic device performance.
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