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CNT manipulation: inserting a carbonaceous dielectric layer beneath using electron beam induced deposition
Narendra Kurrat1, T Vijaykumar, G U Kulkarni
1Chemistry and Physics of Materials Unit, Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur PO, Bangalore 560064, India.
Journal of Nanoscience and Nanotechnology
|April 2, 2011
Summary
Electron beam induced deposition of carbon layers beneath carbon nanotubes (CNTs) was achieved using water vapor. This method enabled electrical measurements along the CNT length via conductive atomic force microscopy (CAFM).
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
Background:
- Electron beam induced deposition (EBID) is a nanofabrication technique.
- Carbonaceous deposition is crucial for modifying material properties.
- Carbon nanotubes (CNTs) possess unique electrical properties.
Purpose of the Study:
- To investigate electron beam induced carbonaceous deposition in the presence of water vapor.
- To control the location of carbon deposition relative to CNTs.
- To enable electrical characterization of CNTs using the deposited layer.
Main Methods:
- Electron beam induced deposition (EBID) in a scanning electron microscope (SEM) chamber.
- Controlled introduction of water vapor at 0.4 torr.
- Varying electron beam energy (10 kV and 25 kV).
- Conductive atomic force microscopy (CAFM) for electrical measurements.
Main Results:
- Carbonaceous deposition occurred beneath CNTs at low beam energy (10 kV).
- Deposition occurred on top of CNTs at higher beam energy (25 kV), consistent with prior studies.
- A dielectric carbonaceous layer beneath the CNT was successfully formed.
- This layer facilitated I-V measurements along the CNT length.
Conclusions:
- Electron beam induced deposition with water vapor offers control over deposition location relative to CNTs.
- The technique allows for the creation of dielectric layers for enhanced electrical characterization of nanostructures.
- This method provides a pathway for site-specific modification and probing of carbon nanotubes.
