Application of scanning probe lithography to graphite patterning

Hyeondeuk Yong1, Hyunsoo Lee, K B Kim

  • 1Faculty of Nanotechnology and Advanced Material Engineering, Sejong University, Seoul 143-747, South Korea.

Summary

Scanning probe lithography in air patterns graphite by etching or oxidation. This technique enables graphene layer peeling for potential nano-device fabrication without contamination.

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