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Updated: Jun 3, 2026

The Microfluidic Probe: Operation and Use for Localized Surface Processing
Published on: June 4, 2009
Note: A scanning thermal probe microscope that operates in liquids
Lionel Aigouy1, Loïc Lalouat, Michel Mortier
1Laboratoire de Physique et d'Etude des Matériaux, UMR CNRS 8213, ESPCI, 10 rue Vauquelin, 75231 Paris Cedex 5, France. lionel.aigouy@espci.fr
Abstract:
We have developed a scanning thermal probe microscope that operates in liquid environments. The thermal sensor is a fluorescent particle glued at the end of a sharp tungsten tip. Since light emission is a strongly thermally sensitive effect, the measurement of the particle fluorescence variations allows the determination of the temperature. No electrical wiring of the probe is needed. As a demonstrative example, we have measured the temperature map of a Joule-heated microheater immersed in a water∕glycerol solution. Both topographical and thermal images are obtained with a good sensitivity.

