Related Experiment Video
Updated: Jun 3, 2026
10:27
Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
Published on: February 27, 2013
Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings
James B Oliver1, Pete Kupinski, Amy L Rigatti
1Laboratory for Laser Energetics, University of Rochester, Rochester, New York 14623-1299, USA. joli@lle.rochester.edu
Applied Optics
|April 5, 2011
Abstract:
Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.
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