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Updated: Jun 3, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Design and manufacture of metal/dielectric long-wavelength cutoff filters
Penghui Ma1, Fengchen Lin, J A Dobrowolski
1National Research Council of Canada, Ottawa, Ontario, Canada. penghui.ma@nrc.gc.ca
Abstract:
Thin films of high reflecting metal, such as Ag, have a high reflectance in the long-wavelength region. When they are combined with dielectric layers, it is possible, through thin film interference effects, to induce transmission in certain shorter wavelength regions. Thus, they are useful components for the design of long-wavelength cutoff filters with a broad rejection region. In this paper, metal/dielectric multilayer designs based on this principle are numerically investigated. Three designs with different cutoff wavelengths and with very broad transmission regions in the visible or near-IR spectral ranges are presented. An excellent rejection on the long-wavelength side extends beyond 20 μm. Experimental results for one of the designs produced in our magnetron sputtering system are given.
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