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Graphene-Assisted Quasi-van der Waals Epitaxy of AlN Film on Nano-Patterned Sapphire Substrate for Ultraviolet Light Emitting Diodes
Published on: June 25, 2020
Improved scratch resistance for antireflective coatings on sapphire
Christoph Gödeker1, Ulrike Schulz, Norbert Kaiser
1Fraunhofer-Institute for Applied Optics and Precision Engineering, Jena, Germany. christoph.goedeker@iof.fraunhofer.de
Applied Optics
|April 5, 2011
Abstract:
Antireflective coatings on sapphire were optimized by variation of the coating design, the total thickness, and the highly refractive material used. The coatings were characterized with a focus on their scratch resistance. An increased resistance against scratching wear is shown for hafnia-containing coatings with a total thickness of about 500 nm.

