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Updated: Jun 2, 2026

Surface Enhanced Raman Spectroscopy Detection of Biomolecules Using EBL Fabricated Nanostructured Substrates

Surface Enhanced Raman Spectroscopy Detection of Biomolecules Using EBL Fabricated Nanostructured Substrates

Published on: March 20, 2015

Multi-layer nanogap array for high-performance SERS substrate.

Myeong-Lok Seol¹, Ju-Hyun Kim, Taejoon Kang

¹Department of Electrical Engineering, KAIST, Daejeon, Republic of Korea.

|April 13, 2011

Summary

This summary is machine-generated.

Researchers developed a simple, photolithography-free method to create a multi-layer nanogap array for surface-enhanced Raman spectroscopy (SERS). This new substrate offers controllable nanogap sizes for enhanced SERS performance.

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Area of Science:

Nanotechnology
Spectroscopy
Materials Science

Background:

Surface-enhanced Raman spectroscopy (SERS) requires precisely engineered substrates.
Existing fabrication methods can be complex and costly.

Purpose of the Study:

To develop a simple, reliable, and photolithography-free fabrication process for a multi-layer nanogap array SERS substrate.
To investigate the influence of nanogap width and polarization on SERS performance.

Main Methods:

Fabrication of a multi-layer nanogap array using deposition and etching.
Utilizing Chemical Vapor Deposition (CVD) for controlled nanogap formation.
Characterization through experiments on nanogap width and polarization angle dependence.

Main Results:

A simple and reliable photolithography-free fabrication process was established.
Uniform and highly controllable nanogap arrays were achieved using CVD.
The nanogap width, controlled by sacrificial film thickness, was identified as a critical parameter for SERS.

Conclusions:

The fabricated multi-layer nanogap array serves as an effective SERS substrate.
The photolithography-free approach offers a scalable and efficient method for SERS substrate fabrication.
Further optimization of nanogap dimensions can enhance SERS sensitivity and selectivity.