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Updated: Jun 2, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Controlled radiation damage and edge structures in boron nitride membranes
Judy S Kim1, Konstantin B Borisenko, Valeria Nicolosi
1Department of Materials, University of Oxford, Parks Road, Oxford OX13PH, U.K. judy.kim@materials.ox.ac.uk
Hexagonal boron nitride membranes show superior resistance to electron beam irradiation compared to graphene. This study reveals their stability and predominant nitrogen-terminated zigzag edges, crucial for advanced material applications.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
Background:
- Graphene's radiation sensitivity limits its use in electron beam-intensive applications.
- Understanding the radiation tolerance of 2D materials is critical for their technological advancement.
Purpose of the Study:
- To compare the electron beam irradiation resistance of hexagonal boron nitride (hBN) and graphene.
- To investigate the radiation damage mechanisms in hBN membranes.
- To characterize the edge structures and termination species of hBN.
Main Methods:
- Synthesis of hBN membranes via chemical exfoliation.
- Electron beam irradiation at 80 kV.
- Quantum chemical calculations for radiation damage modeling.
- High-resolution microscopy for structural analysis.
Main Results:
- hBN membranes exhibit higher resistance to electron beam irradiation than graphene.
- Monolayer hBN remains stable, forming no vacancy defects or amorphization.
- Predominant zigzag edge structures were observed in freestanding and supported hBN.
- Elemental analysis confirmed nitrogen as the predominant zigzag edge termination species.
Conclusions:
- Hexagonal boron nitride is a highly radiation-tolerant 2D material, outperforming graphene.
- The intrinsic stability of hBN makes it suitable for applications requiring high electron beam exposure.
- The identified N-terminated zigzag edges offer insights into hBN's surface chemistry and reactivity.
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