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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
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High-resolution three-dimensional scanning transmission electron microscopy characterization of oxide-nitride-oxide

Shoji Sadayama1, Hiromi Sekiguchi, Alexander Bright

  • 1FEI Company Japan Ltd., NanoPort Japan, 13-34 Kohnan 2-chome, Minato-ku, Tokyo, Japan. shoji.sadayama@fei.com

Journal of Electron Microscopy
|May 14, 2011
PubMed

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