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Updated: Jun 1, 2026

A Stable Phantom Material for Optical and Acoustic Imaging
Published on: June 16, 2023
Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage
Tung Hsien Hsieh1, Wen Yuh Jywe, Shang Liang Chen
1Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan 701, Taiwan. a58503147@yahoo.com.tw
Abstract:
A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is ±30 nm∕200 nm and ±0.04 arcsec∕0.1 arcsec at 1000 Hz.
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